Dry Etching
Philips
Philips Innovation Services creates the bridge from idea to market for each innovation journey. Making innovation work, is our drive as well as our deliverable. By bringing together all the required experience, expertise, methods and tools, we get things done. In a reliable, cost-effective way. On time. Driven by our deep technical creativity, we continue where others stop, to make innovation work.
MedPhab partner
[TECHNICAL] TECHNICAL SERVICES
Non-photonic peripherals
NON-PHOTONIC PERIFERALS [MEMS] Si-processing
NP4 MEMS
Si-processing SiN-processing
in vitro diagnostics in vivo diagnostics therapeutics others
Technology provider Supplier Manufacturer Production services Integrator R&D Clinical
Dry etching involves the processes in which a removal of material is produced by means of bombardment of ions that disrupts parts of the exposed surface. For additional information, visit our website: https://www.innovationservices.philips.com/looking-expertise/mems-micro-devices/
Different Substrates Si, III/V, glass…
Wafer size 100, 150, 200 mm
Etching materials Metals, non-metals, DRIE
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ISO 9001, ISO 13485, ISO 14001
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