PECVD
Philips
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MedPhab partner
[TECHNICAL] TECHNICAL SERVICES
Non-photonic peripherals
NON-PHOTONIC PERIFERALS [MEMS] Si-processing
NP4 MEMS
Si-processing SiN-processing
in vitro diagnostics in vivo diagnostics therapeutics others
Technology provider Supplier Manufacturer Production services Integrator R&D Clinical
Plasma enhanced chemical vapor deposition (PECVD) is a type of a CVD in which chemical reactions occur after the creation of plasma of the reacting gases. It is a proces used to deposit thin films from gas precursors to a solid thin film on a substrate. For additional information, visit our website: https://www.innovationservices.philips.com/looking-expertise/mems-micro-devices/
Different sustrates Si, III/V, glass…
Wafer size 100, 150, 200 mm
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ISO 9001, ISO 13485, ISO 14001
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