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Polymer photonics structures
VTT-Technical Research Centre of Finland
VTT is one of Europe’s leading research institutions, owned by the Finnish state. Our task is to advance the utilisation and commercialisation of research and technology in commerce and society.
MedPhab partner
[TECHNICAL] TECHNICAL SERVICES
Photonic components
PHOTONIC COMPONENTS [Integrated circuits] Polymer photonics
PC1 Integrated circuits
Polymer photonics
in vitro diagnostics in vivo diagnostics others
Technology provider Manufacturer Production services Integrator R&D Consultancy Equipment
Direct patterning of polymer photonics structures by combined nanoimprinting and lithography using modified mask aligner, hybrid mask mold and directly patternable, UV-curable materials. Patterning of structures is carried out in wafer-level fashion using VTT's Obducat Eitre? 6 nanoimprinting system and Karl Suss MA6 Mask Aligner.
Lithography mode Vacuum
UV source Mercury lamp
UV dose 300 mJ/cm2
Post-expo baking temperature 110 C
Hard-baking temperature 130 C
Stamp size <152 mm
Substrate size <152 mm
Stamp + substrate thickness <5 mm
Imprint area (max) 152 mm
Imprint pressure (max) 80 bar
Imprint temperature (min) Ambient
Imprint temperature (max) 200 C
Imprint temperature field uniformity -3 %
Imprint temperature setting accuracy -2 C
UV source Mercury lamp
Wavelength 250-1000 nm
Exposure on sample (approx.) 25 mW/cm2
Alignment of transparent stamp 2 fiducials
Direct patterning of polymer photonics structures by combined nanoimprinting and lithography using modified mask aligner, hybrid mask mold and directly patternable, UV-curable materials. Patterning of structures is carried out in wafer-level fashion using VTT's Obducat Eitre? 6 nanoimprinting system
1 2 3 4
1 2 3 4
ISO9001
1-10
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