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Thermal and UV Nano Imprint Lithography
VTT-Technical Research Centre of Finland
VTT is one of Europe’s leading research institutions, owned by the Finnish state. Our task is to advance the utilisation and commercialisation of research and technology in commerce and society.
MedPhab partner
[TECHNICAL] TECHNICAL SERVICES
Photonic components
PHOTONIC COMPONENTS [Micro-optics] Polymer
PC2 Micro-optics
Polymer
in vitro diagnostics in vivo diagnostics others
Technology provider Manufacturer Production services Integrator R&D Consultancy Equipment
Manual 6-inch diameter full area thermal and/or UV Nano Imprint Lithography system. VTT's Obducat Eitre 6 system allows the possibility of conducting thermal and/or UV NIL and hot embossing at temperatures up to 200 degC.
Stamp size <152 mm
Substrate size <152 mm
Stamp + substrate thickness <5 mm
Imprint area (max) 152 mm
Imprint pressure (max) 80 bar
Imprint temperature (min) Ambient
Imprint temperature (max) 200 C
Imprint temperature field uniformity -3 %
Imprint temperature setting accuracy -2 C
UV source Mercury lamp
Wavelength 250-1000 nm
Exposure on sample (approx.) 25 mW/cm2
Alignment of transparent stamp 2 fiducials
Manual 6-inch diameter full area thermal and/or UV Nano Imprint Lithography system. VTT's Obducat Eitre 6 system allows the possibility of conducting thermal and/or UV NIL and hot embossing at temperatures up to 200 degC.
1 2 3 4
1 2 3 4
ISO9001
1-10
Link to Organization registry